With its well-known c.PLASMA technology platform, centrotherm has developed one of the best-selling equipments for PECVD processes in solar cell production. The well-established batch-type system with direct plasma technology has emerged as the undisputed industry standard.

The newly developed c.PLASMA Q MAX is more than an update of the current system platform. With up to 10,000 processed wafers per hour, the system represents nothing less than a quantum leap in high-volume solar cell manufacturing.

The existing design of the multi-stack tube arrangement was completely revised and replaced by a single process chamber in which 3 loaded graphite boats can be processed in one single run. Thanks to its new innovative technology c.PLASMA Q MAX achieves an unprecedented cycle time in PECVD processing. To ensure high system availability, the main focus of development was on ease of service and maintenance. All system components are easily accessible and the process chamber features an automatic lid opening mechanism.

In addition to the significant savings in media consumption and total cost of ownership, the system has a very good ecological balance and a minimized CO₂ footprint.