VERTICAL

Vertical wafer process system for R&D and production of Si-based semiconductors

The centrotherm c.VERTICOO platform for batch-type wafer processing is ideally suited for many semiconductor device fabrication steps. The special design of process chamber and heating system provides maximum flexibility for all standard atmospheric and LPCVD processes with temperatures up to 1100 °C.

The stand-alone system is available as high-throughput version for mass production or mini-batch equipment for R&D and low-volume production. Both models are outstanding for high performance, small footprint, low cost of ownership and ease of maintainance.

The high-volume furnace c.VERTICOO 200 combines a single-tube setup with dual boat logistics and fully automated carrier-to-carrier wafer handling ensuring maximum throughput with batch sizes up to 150 wafers.

The mini-batch furnace c.VERTICOO Mini meets the demanding requirements of semiconductor device R&D and allows customers to reduce development costs by processing a maximum of 50 wafers per batch.

Processes

Atmospheric processes

  • Diffusion
  • Dry oxidation
  • Wet oxidation (centrotherm Hydrox)
  • Annealing (H2, N2)

LPCVD processes

  • Polysilicon (doped, undoped)
  • Silicon nitride
  • Silicon oxynitride
  • TEOS oxide
  • High-temperature oxide

Options

  • Atmospheric pressure compensation
  • N2 load lock
  • Fast cooling

Sales Semiconductor & Microelectronics

Tel. +49 7344 918 6794
E-Mail

Find us at

ECSCRM
ECSCRM
Vinci International Convention Centre Tours, France

Features & Benefits

  • Auto alignment
  • Dual boat logistics
  • Water cooled heating cassette
  • Internal storage for 20 carriers

Service friendly and space saving design

  • Main service access at rear side through large doors
  • Hinged service monitor for easy access
  • Fast and easy tube and liner exchange
  • Small footprint (3.1 m2)
  • Designed for side-by-side installation
Wafer sizes up to 200 mm

Wafer sizes up to 200 mm

High process flexibility

High process flexibility

Lowest total CoO

Lowest total CoO

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This is the website of centrotherm international AG, Blaubeuren. If you are looking for the website of Centrotherm Systemtechnik GmbH, Brilon, Germany please click here. Please note that the two companies have no business connection with one another.