SiC Power MOSFETs
We are one of the world's leading technology providers for high-temperature annealing and oxidation processes with a strong market presence especially in SiC applications.
PERC solar cells
We provide the equipment for the key thermal process steps in PERC solar cell manufacturing and are technology leading in AlOx rear side passivation.
We develop production equipment for deposition, diffusion and oxidation of wafers as well as for encapsulation in finished chips.
For the production of GaN RF power transistors, we develop process equipment for high-temperature annealing and thermal oxide deposition.
Alternative carbon fibers
Our innovative low-pressure oxidation drives the production of carbon fibers from cellulose and also cuts the costs for PAN and Homo PAN fibers significantly.