The c.DCB conveyor furnace is especially designed for direct copper bonding (DCB) applications. The system provides a high process capability and ensures an economic and efficient production.
A PLC system with bus connection monitors and controls all relevant process parameters. Data logging of process data for documentation and quality management complements the system.
Gas purity and gas flow inside the process channel play a central role to the product quality. All c.DCB furnaces are characterized by a gas tight muffle with excellent temperature and process gas control.
Processes
Direct Copper Bonding
Options
Profiling system with thermocouple
Features & Benefits
Excellent cross-temperature uniformity (<1%)
Easy temperature profile adjustment by separate controlled heating zones
Independent gas system for N2 curtain and N2 process atmosphere
Process muffle tensioner
Conveyor belt tightener
Oxygen concentration analyzer
O2 controller with MFC for bonding and preheating area
Type S thermocouples
Manual belt wheel enables belt transport in case of power failure
