Process solutions

for the semiconductor and microelectronics industry

centrotherm has been developing and implementing innovative thermal solutions for more than 70 years. As a leading and globally operating technology group, we offer production solutions for the semiconductor and microelectronics industries.

The continuous further development of our technology for thermal processing and layer deposition on semiconductor materials is the basis for successful partnerships with industry and science. Our customers worldwide appreciate the process stability, scalability and reliability of our production systems in laboratory or pilot scale as well as in mass production. We develop pioneering process technologies that are specifically tailored to our customers' requirements. In this way, we generate competitive advantages for our customers through dedicated innovative process and production solutions.

From silicon to WBG compound semiconductors

As one of the leading developers and manufacturers of production equipment, we offer solutions for various semiconductor technologies and applications. Our technology portfolio includes equipment for processing various substrates and material classes - from silicon-based semiconductors to wide bandgap WBG semiconductors such as SiC or GaN.

We realize your individual application with advanced process technologies

Our process expertise

Wafer manufacturing

Silicon

Annealing
Wet / dry oxidation
LP Poly

SOI

Wet / dry oxidation

SiC

HT Annealing

Power semiconductor

MOS

Diffusion / Oxidation
LPCVD
RTP

IGBT

HT Oxidation / Drive-in
Al/Ga Deposition / Diffusion
Thin-wafer annealing
Vacuum soldering

GaN HEMT

Dielectrics / Passivation
RTP

SiC MOSFET

Annealing (Activation / Trench smoothing)
Oxidation (Gate /POA)
RTP

MEMS / TSV

Poly Si / SiGe (doped / undoped)
Low-stress SiN / SiO
Doped / undoped SiO₂ (TEOS / LTO / HTO)
Vacuum soldering

Optoelectronics

VCSEL

LT wet oxidation
Vacuum soldering

Laser diodes / Fiber optic communication

Vacuum soldering

Advanced Packaging

Vacuum soldering
Bump reflow
Vacuum sealing

Passive components

Copper

Direct Copper Bonding (DCB)
Active metal brazing

Ceramics

Sintering (MLCC / LTCC)

Glass

Reflow soldering
Glass to substrate bonding

Leading technology for SiC high-temperature processing

Wafers up to 200 mm

With our high-temperature furnaces for annealing and oxidation processes for SiC wafers up to 150 mm we are the global technology leader and supplier to renowned manufacturers of power electronics. Our next generation equipment for 200 mm wafers which is bridging-capable for 150 mm wafers enables our customers to reduce their costs by up to 23%.

R&D projects

centrotherm is consortium partner and technology provider of the European research projects TRANSFORM and REACTION, which are funded by the EU as part of the KDT JU (Key Digital Technologies Joint Undertaking) research program and national funding authorities. The projects aim to strengthen European competitiveness in SiC manufacturing and making the new technology industrially mature. The technology enables a significant increase of electrical energy efficiency.

In addition to technological and societal goals, the main goal is paving a way to a green economy, e.g. by a climate neutral mobility.