Key equipment for the manufacture of crystalline solar cells

Due to high throughput and comparatively low cost of ownership centrotherm diffusion furnaces support the highest demands of serial crystalline solar cell production. The closed quartz tubes enable an ultra clean diffusion process that in combination with an easy realization of high emitter resistivities leads to an increase of efficiency. In addition to our standard systems for serial production we supply configurations for the purposes of research and development.

• diffusion with phosphorus and boron (atmospheric and low pressure)
• wet and dry oxidation
• annealing
• 4 or 5 stack configuration
• high availability due to redundancy
• high throughput and short cycle times due to optimized process flows
• highest cleanness

In addition to batch-type diffusion furnaces our product range includes inline systems for continuous inline diffusion. Due to its inline design the diffusion furnace guarantees an excellent overall uniformity from wafer to wafer and ensures continuous production and process flows. Our inline diffusion furnaces are available as stack or belt configurations.

• phosphorus diffusion (POCl₃)
• precursor for phosphorus and boron
• annealing
• high availability due to redundancy
• high throughput and short cycle times due to optimized process flows
• low total cost of ownership
• highest cleanness

For anti-reflective coating, which is a key process in solar cell production, centrotherm photovoltaics offers PECVD systems for the deposition of silicon nitride. Due to high availability, low downtime and low cost of ownership our PECVD systems suit perfectly for serial production. Besides, our product range contains low pressure systems with high process flexibility for anti-reflective coating in research and development.

• high availability due to redundancy
• high throughput and short cycle times due to optimized handling sequences
• low total cost of ownership
• direct plasma for highest efficiencies
• excellent passivation characteristics due to control of hydrogen content
• highest cleanness
• no periodic downtime (outside cleaning by boat etching)

centrotherm photovoltaics supplies fast firing furnaces for sintering the metal contacts to ensure good electrical contact with the silicon. These conveyor furnaces feature highest throughput as well as low cost of ownership. Due to high belt speed and a long burn out zone the furnaces achieve a short cycle time and remove all organics. Besides, our fast firing furnaces are available with integrated high speed dryers that eliminate one handling step.

• suitable for wafer sizes up to 210 mm
• multi-lane furnaces for higher throughput
• available as combination with high speed dryer
• optimal adjustable peak zone
• various belt versions available
• fully automatic work mode

For drying the metal contacts on the wafers centrotherm photovoltaics supplies drying furnaces that are designed for high volume solar cell production. Our conveyor drying furnaces feature high throughput, whereas the modular design ensures an optimized drying process. Optionally the furnaces are available with air condensation for exhaust gas cleaning.

• suitable for wafer sizes up to 210 mm
• multi-lane furnaces for higher throughput
• modular assembly for an optimal adjusted drying performance
• various belt widths available
• fully automatic work mode